BACKEND Wafer Processing

One stop shop for wafeR LEVEL SHIP SCALE PACKAGING (WLCSP)

standard process

  • Incoming Inspection
  • Laser Mark
  • Mark Inspection
  • Wafer Mount
  • Wafer Dice
  • Wafer Clean
  • Dice Inspection

Laser Mark

Wafer laser marking component traceability
  • Marking of backside wafers facilitates traceability of semiconductor devices
  • Marks of negligible influence on the devices
  • Marking accuracy of 10 um
  • Up to 12" in size

Wafer dicing

Wafer dicing equipment to support back end wafer processing.
  • On-line blade load monitoring system ensures high quality cut
  • Intelligent blade wear learning automatically compensates for blade wear
  • Close loop control for ultimate cut quality
  • Robust platform supports the most demanding application
  • Vision kerf statistical process control